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Custom Films, Metals & Photolithography Available
on 3" to 300mm Wafers:
Thermal Oxide PECVD Teos Plasma Oxide Low Temp. Oxide
LPCVD Nitride PECVD Nitride
BPSG
Polysilicon
Metals:
Aluminum
Al/Cu or Al/Si
Al/Si/Cu
Ti, TiN
W
TiW
Tantalum
Platinum
Photolithography 0.09um or larger
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