Thermal Oxide Service

WRS Materials thermal oxidation furnaces are certified for growing wafers of 50.2 mm to 300 mm in diameter. We guarantee a 5 percent industry-standard uniformity across every batch, but typically our processed wafers qualify at a far better rate, enabling us to meet the tightest of customer specifications. With our dry thermal oxidation method, we grow oxides of 500 to 2000 angstroms, and our wet thermal oxidation process is applied for oxides of 2,000 to 100,000 angstroms.

Oxidation Service Parameters

• Available for wafers of 50.2mm-300mm in diameter
• Produces oxidation thicknesses of 500-100,000 angstroms
• Offers volume discounts
• Accommodates all quantities, with a minimum batch order of 25 wafers