WRS Materials provides an extensive list of additional films services and we also maintain an exclusive agreement with Novellus Systems for many of the films listed below. Contact your WRS Materials Sales Representative for further information.
OXIDE - Thermal, USG, PECVD Oxide, TEOS, HDP, CORAL-Carbon Doped Oxide (k=3.0)
NITRIDE - LPCVD, PECVD
METALS - Ti, Ta, Cu, Al, TaN, TiN, TiW, W, Cr, Al/Cr, Au, Pt
MISC OTHER FILMS - Polysilicon, BPSG, Black Diamond, SiC, Photoresist, Photolithography, Polyamide, FSG, NF-ARL (SiON), Amorphous Carbon.
PATTERN WAFER PRODUCTS 8"
MIT 854 Cu/TEOS
MIT 854 Cu/BD1
PATTERN WAFER PRODUCTS 12"
MIT 754 Cu/TEOS
ATR 40 Cu/CORAL Damascene - 90 nm min CD (Novellus mask)