Thin Films

WRS Materials provides an extensive list of additional films services and we also maintain an exclusive agreement with Novellus Systems for many of the films listed below. Contact your WRS Materials Sales Representative for further information.

OXIDE - Thermal, USG, PECVD Oxide, TEOS, HDP, CORAL-Carbon Doped Oxide (k=3.0)

NITRIDE - LPCVD, PECVD

METALS - Ti, Ta, Cu, Al, TaN, TiN, TiW, W, Cr, Al/Cr, Au, Pt

MISC OTHER FILMS - Polysilicon, BPSG, Black Diamond, SiC, Photoresist, Photolithography, Polyamide, FSG, NF-ARL (SiON), Amorphous Carbon.

PATTERN WAFER PRODUCTS 8"

MIT 854 Cu/TEOS

MIT 854 Cu/BD1

PATTERN WAFER PRODUCTS 12"

MIT 754 Cu/TEOS

ATR 40 Cu/CORAL Damascene - 90 nm min CD (Novellus mask)